Investigation of changes in the paramets of thin films structures during ion implantation
... Sheludyakov S., Bogdanov E. Ion beam assisted deposition of novel thin film materials and coatings // Materials Science Forum. 2011. Vol. 674. P. 195.
9. Bruker: innovation with integrity. URL: www.bruker.com (дата обращения:12.04.2014).
Medvedeva S., Koiva D., Shemuhin A., Cernykh P.
X-ray reflectivity, X-ray diffractometry, ion implantation, crystallite size, thickness of thin films
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